Thermal oxidation rates and resulting optical constants of Al<sub>0.83</sub>In<sub>0.17</sub>N films grown on GaN

نویسندگان

چکیده

The thermal oxidation rates of Al0.83In0.17N layers grown lattice-matched to GaN and the oxide's optical constants are studied. ?230 nm thick AlInN placed into a horizontal furnace at elevated temperatures exposed either O2 (dry) or H2O vapor with an N2 carrier gas (wet). samples oxidized different (830–870 °C) constant time various times temperature 830 °C. Spectroscopic ellipsometry is used determine oxide thicknesses, refractive index, extinction coefficients. rate for wet conditions faster than dry conditions, both increase temperature, as expected. However, also dynamic can be fitted Deal–Grove model, suggesting reaction diffusion-limited processes like other more mature semiconductors. Finally, produce oxides that expand produced under conditions. ability thermally oxidize promising process technique producing new III-nitride-based electronic devices.

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ژورنال

عنوان ژورنال: Journal of Applied Physics

سال: 2021

ISSN: ['1089-7550', '0021-8979', '1520-8850']

DOI: https://doi.org/10.1063/5.0035711